Temperature Measurement during Millisecond Annealing Ripple Pyrometry for Flash Lamp Annealers
Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal an...
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| Format: | eBook |
| Language: | English |
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Wiesbaden
Springer Fachmedien Wiesbaden
2015, 2015
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| Edition: | 1st ed. 2015 |
| Series: | MatWerk
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| Collection: | Springer eBooks 2005- - Collection details see MPG.ReNa |
Table of Contents:
- Introduction and motivation.- Fundamentals of flash lamp annealing of shallow Boron-doped Silicon.- Fundamentals of surface temperature measurements during flash lamp annealing
- Concept of ripple pyrometry during flash lamp annealing
- Ripple pyrometry for flash lamp annealing.- Experiments – ripple pyrometry during flash lamp annealing.- Closing discussion and outlook