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Micro and Nano Fabrication Tools and Processes

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes...

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Bibliographic Details
Main Authors: Gatzen, Hans H., Saile, Volker (Author), Leuthold, Jürg (Author)
Format: eBook
Language:English
Published: Berlin, Heidelberg Springer Berlin Heidelberg 2015, 2015
Edition:1st ed. 2015
Subjects:
Manufactures
Nanotechnology And Microengineering
Manufacturing, Machines, Tools, Processes
Nanotechnology
Online Access:
Collection: Springer eBooks 2005- - Collection details see MPG.ReNa
Description
Summary:For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control
Physical Description:XXVI, 519 p. 357 illus., 54 illus. in color online resource
ISBN:9783662443958

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