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LEADER |
00626nmm a2200181 u 4500 |
001 |
EB000890210 |
003 |
EBX01000000000000000687330 |
005 |
00000000000000.0 |
007 |
cr||||||||||||||||||||| |
008 |
140721 ||| |
020 |
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|a 9780819499738
|
245 |
0 |
0 |
|a Metrology, Inspection, and Process Control for Microlithography XXVIII
|h Elektronische Ressource
|
260 |
|
|
|a Bellingham, Wash.
|b SPIE
|c 2014
|
989 |
|
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|b SPIE
|a SPIE Conference Proceedings
|
490 |
0 |
|
|a Proceedings of SPIE
|
856 |
4 |
0 |
|u https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9050
|x Verlag
|3 Volltext
|
082 |
0 |
|
|a 600
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082 |
0 |
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|a 500
|