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Cleanrooms Facilities and Practices

In writing this book, our goal was to produce a much needed teaching and reference text with a fresh approach to c1eanroom technology. The most obvious technological reason for bringing this book into being is that c1ean­ rooms have become vital to the manufacture and development of high­ technology...

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Bibliographic Details
Main Author: Kozicki, Michael
Format: eBook
Language:English
Published: Dordrecht Springer Netherlands 1991, 1991
Edition:1st ed. 1991
Subjects:
Humanities And Social Sciences
Humanities
Social Sciences
Online Access:
Collection: Springer Book Archives -2004 - Collection details see MPG.ReNa
Table of Contents:
  • Appendix 1 Federal Standard 209D
  • Appendix 2 Simplified Cleanroom Certification Procedure
  • Appendix 3 Program and Sample Output
  • 1. Introduction to Cleanroom Technology
  • The Need for Cleanrooms
  • An Overview of Semiconductor Technology
  • Other Cleanroom Applications
  • The Impact of Cleanroom Technology
  • 2. Microcontamination
  • Types of Contamination
  • Sources of Contamination
  • Effects of Contamination
  • Summary
  • 3. Controlled Environment Concepts
  • Performance Considerations
  • Performance Standards
  • Parameter Measurement
  • Summary
  • 4. Creating Clean Areas
  • Construction Materials and Techniques
  • Air Filtration
  • Airflow
  • Equipment and Material Decontamination
  • Bringing Items into the Cleanroom
  • Summary
  • 5. Cleanroom Layout
  • Mixed Flow Rooms
  • Local Unidirectional Flow
  • Modular Cleanrooms
  • Tunnel Cleanrooms
  • Total Vertical Laminar Flow
  • Horizontal Laminar Flow
  • Process Equipment
  • Designing for Cleanroom Class
  • Summary
  • 6. Preconditioning, Control, and Static
  • Air Handling Systems
  • Fans and Air Control
  • Static
  • Summary
  • 7. Site and Structural Considerations
  • Vibration
  • Site Selection
  • Structure
  • Internal Vibration Engineering
  • Summary
  • 8. Cleanrooms, Codes, and Legislation
  • Principal Codes
  • Fire Protection
  • Legislation
  • Summary
  • 9. Ultrapure Water
  • The Need for Ultrapure Water
  • Constituents of Raw Water
  • Purification Techniques
  • RO/DI System Configurations
  • Operational Considerations
  • Summary
  • 10. Production Materials
  • Gases
  • Wet Chemicals
  • Handling Other Materials
  • Summary
  • 11. Personnel and Contamination
  • Apparel
  • Use of Apparel
  • Work Practices
  • Summary
  • 12. Safety Issues
  • Properties of Hazardous Production Materials
  • Cleanroom Safety Practices
  • Safety Equipment
  • Handling Hazardous Production Materials
  • Summary
  • 13. The Future of Controlled Environments
  • Advanced Cleanroom Concepts
  • Enclosed Transfer Systems
  • Robotics and Automation.-In-situ Processing
  • Epilog—The Cleanroom as a System

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