Crucial Issues in Semiconductor Materials and Processing Technologies

Semiconductors lie at the heart of some of the most important industries and technologies of the twentieth century. The complexity of silicon integrated circuits is increasing considerably because of the continuous dimensional shrinkage to improve efficiency and functionality. This evolution in desi...

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Corporate Author: SpringerLink (Online service)
Other Authors: Coffa, S. (Editor), Priolo, F. (Editor), Rimini, Emanuele (Editor), Poate, J.M. (Editor)
Format: eBook
Language:English
Published: Dordrecht Springer Netherlands 1992, 1992
Edition:1st ed. 1992
Series:Nato Science Series E:, Applied Sciences
Subjects:
Online Access:
Collection: Springer Book Archives -2004 - Collection details see MPG.ReNa
Summary:Semiconductors lie at the heart of some of the most important industries and technologies of the twentieth century. The complexity of silicon integrated circuits is increasing considerably because of the continuous dimensional shrinkage to improve efficiency and functionality. This evolution in design rules poses real challenges for the materials scientists and processing engineers. Materials, defects and processing now have to be understood in their totality. World experts discuss, in this volume, the crucial issues facing lithography, ion implication and plasma processing, metallization and insulating layer quality, and crystal growth. Particular emphasis is placed upon silicon, but compound semiconductors and photonic materials are also highlighted. The fundamental concepts of phase stability, interfaces and defects play a key role in understanding these crucial issues. These concepts are reviewed in a crucial fashion
Physical Description:XIX, 538 p online resource
ISBN:9789401127141