Physical and Technical Problems of SOI Structures and Devices

In Physical and Technical Problems of SOI Structures and Devices, specialists in silicon-on-insulator technology from both East and West meet for the first time, giving the reader the chance to become acquainted with work from the former Soviet Union, hitherto only available in Russian and barely av...

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Corporate Author: SpringerLink (Online service)
Other Authors: Colinge, J.-P. (Editor), Lysenko, Vladimir S. (Editor), Nazarov, Alexei N. (Editor)
Format: eBook
Language:English
Published: Dordrecht Springer Netherlands 1995, 1995
Edition:1st ed. 1995
Series:Nato Science Partnership Subseries: 3, High Technology
Subjects:
Online Access:
Collection: Springer Book Archives -2004 - Collection details see MPG.ReNa
Summary:In Physical and Technical Problems of SOI Structures and Devices, specialists in silicon-on-insulator technology from both East and West meet for the first time, giving the reader the chance to become acquainted with work from the former Soviet Union, hitherto only available in Russian and barely available to western scientists. Keynote lectures and state-of-the-art presentations give a wide-ranging panorama of the challenges posed by SOI materials and devices, material fabrication techniques, characterisation, device and circuit issues
Physical Description:X, 290 p online resource
ISBN:9789401101097