Emerging Technologies for In Situ Processing
| Other Authors: | , |
|---|---|
| Format: | eBook |
| Language: | English |
| Published: |
Dordrecht
Springer Netherlands
1988, 1988
|
| Edition: | 1st ed. 1988 |
| Series: | NATO Science Series E:, Applied Sciences
|
| Subjects: | |
| Online Access: | |
| Collection: | Springer Book Archives -2004 - Collection details see MPG.ReNa |
Table of Contents:
- 1. In-Situ Processing Combining MBE, Lithography and Ion-Implantation
- 2. Motivations and Early Demonstrations for In-Situ Processings For III-V Semiconductor Devices
- 3. Laser Etching and Microelectronic Applications
- 4. Laser-Induced Chemical Processing of Materials
- 5. High Technology Manufacturing: Critical Issues for the Future
- 6. Ultra High Vacuum Processing: MBE
- 7. Epitaxial Growth of III-V Materials on Implanted III-V Substrates
- 8. Mechanisms of Laser-Induced Deposition from the Gas Phase
- 9. Time Resolved Measurements in the Thermally Assisted Photolytic Laser Chemical Vapor Deposition of Platinum
- 10. Excimer Laser Projection Patterning
- 11. Excimer Laser Patterning and Etching of Metals
- 12. Ion Projection Lithography
- 13. UV Light-Assisted Deposition of A1 on Si from TMA
- 14. E-Beam Induced Decomposition of Inorganic Solids
- 15. Electronic Connection Through Silicon Wafers
- 16. The Development and Use of Novel Precursors for Photolytic Deposition of Dielectric Films
- 17. Focused Ion Beam Induced Deposition
- 18. Laser-Induced Metal Deposition for Clear Defect Repair Work on X-Ray Masks
- 19. Confirmation of the Wavelength Dependence of Silicon Oxidation Induced By Visible Radiation
- 20. Focused Ion Beam Technology and Applications
- 21. Laser Direct Writing for Device Applications
- 22. Laser-Induced Photoetching of Semiconductors with Chlorine
- 23. Recent Advances in Photo-Epitaxy for Infrared Detector Fabrication
- 24. Synthesis and Characterization of Laser Driven Powders
- 25. Physical Properties of Laser Written Chromium Oxide Thin Films
- 26. UV Laser Induced Oxidation of Silicon in Solid and Liquid Phase Regime
- 27. Laser Assisted Plasma Etching of Silicon Dioxide
- 28. Nd: Yag Laser Processing for Circuit modification and DirectWriting of Silicon Conductors
- 29. Study of Excimer laser Enhanced Etching of Copper and Silicon With (SUB) Monolayer Coverages of Chlorine
- 30. Surface Chemical Probes and Their Application to the Study of In Situ Semicmductor Processing