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Epitaxy Physical Principles and Technical Implementation

Epitaxy provides readers with a comprehensive treatment of the modern models and modifications of epitaxy, together with the relevant experimental and technological framework. This advanced textbook describes all important aspects of the epitaxial growth processes of solid films on crystalline subst...

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Bibliographic Details
Main Authors: Herman, Marian A., Richter, W. (Author), Sitter, Helmut (Author)
Format: eBook
Language:English
Published: Berlin, Heidelberg Springer Berlin Heidelberg 2004, 2004
Edition:1st ed. 2004
Series:Springer Series in Materials Science
Subjects:
Physical Chemistry
Optical Materials
Chemistry, Technical
Crystallography
Materials / Analysis
Characterization And Analytical Technique
Industrial Chemistry
Crystallography And Scattering Methods
Online Access:
Collection: Springer Book Archives -2004 - Collection details see MPG.ReNa
Table of Contents:
  • I. Basic Concepts
  • 1. Introduction
  • 2. Homo- and Heteroepitaxial Crystallization Phenomena
  • 3. Application Areas of Epitaxially Grown Layer Structures
  • II. Technical Implementation
  • 4. Solid Phase Epitaxy
  • 5. Liquid Phase Epitaxy
  • 6. Vapor Phase Epitaxy
  • 7. Molecular Beam Epitaxy
  • 8. Metal Organic Vapor Phase Epitaxy
  • III. In-situ Analysis of the Growth Processes
  • 9. In-situ Analysis of Species and Transport
  • 10. In-situ Surface Analysis
  • IV. Physics of Epitaxy
  • 11. Thermodynamic Aspects
  • 12. Atomistic Aspects
  • 13. Quantum Mechanical Aspects
  • V. Heteroepitaxy
  • 14. Heteroepitaxy; Growth Phenomena
  • 15. Material-Related Problems of Heteroepitaxy
  • 16. Closing Remarks
  • References
  • List of Abbreviations
  • List of Metalorganic Precursors

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