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Technology of Integrated Circuits

Strongly involved with SIEMENS Corp. in the tremendous recent developments of process technologies for IC fabrication the authors comprehensively record their authoritative knowledge and practical experience. New materials , modern planar technology, process designs for CMOS, Bipolar, BICMOS and sma...

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Bibliographic Details
Main Authors: Widmann, D., Mader, H. (Author), Friedrich, H. (Author)
Format: eBook
Language:English
Published: Berlin, Heidelberg Springer Berlin Heidelberg 2000, 2000
Edition:1st ed. 2000
Series:Springer Series in Advanced Microelectronics
Subjects:
Electronics And Microelectronics, Instrumentation
Optical Materials
Chemistry, Technical
Electronics
Industrial Chemistry
Online Access:
Collection: Springer Book Archives -2004 - Collection details see MPG.ReNa
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245 0 0 |a Technology of Integrated Circuits  |h Elektronische Ressource  |c by D. Widmann, H. Mader, H. Friedrich 
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505 0 |a 1 Introduction -- 2 Basic principles of integrated circuits technology -- 3 Film technology -- 4 Lithography -- 5 Etching technology -- 6 Doping technology -- 7 Cleaning technology -- 8 Process integration -- References 
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653 |a Optical Materials 
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653 |a Optical materials 
653 |a Industrial Chemistry 
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520 |a Strongly involved with SIEMENS Corp. in the tremendous recent developments of process technologies for IC fabrication the authors comprehensively record their authoritative knowledge and practical experience. New materials , modern planar technology, process designs for CMOS, Bipolar, BICMOS and smart-power technologies, self-adjusting doping techniques are just a few of the highlights. With its strong application-orientation this is a need-to-have book for professionals in semiconductor industries. Senior students in electrical engineering and physics can use it as a textbook because of the systematic treatment of the subjects. With regard to their later careers as industrial engineers they will particularly appreciate the deep insight into the actual methods and problems of IC manufacturing 

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