High-Resolution X-Ray Scattering from Thin Films and Multilayers

This critical overview presents experimental methods for solving most frequent strucutral problems of mono-crystalline thin films and layered systems: thickness, crystalline state, strain distribution, interface quality and other properties. A unified theoretical approach based on kinematical and dy...

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Bibliographic Details
Main Authors: Holy, Vaclav, Pietsch, Ullrich (Author), Baumbach, Tilo (Author)
Format: eBook
Language:English
Published: Berlin, Heidelberg Springer Berlin Heidelberg 1999, 1999
Edition:1st ed. 1999
Series:Springer Tracts in Modern Physics
Subjects:
Online Access:
Collection: Springer Book Archives -2004 - Collection details see MPG.ReNa
Description
Summary:This critical overview presents experimental methods for solving most frequent strucutral problems of mono-crystalline thin films and layered systems: thickness, crystalline state, strain distribution, interface quality and other properties. A unified theoretical approach based on kinematical and dynamical scattering theories describes the experimental methods. This book is a ready-to-hand reference for experimentalists who want to improve their knowledge on modern x-ray methods for thin-film analysis
Physical Description:XI, 258 p. 140 illus online resource
ISBN:9783540496250