Micromachined Mirrors
Micromachined Mirrors provides an overview of the performance enhancements that will be realized by miniaturizing scanning mirrors like those used for laser printers and barcode scanners, and the newly enabled applications, including raster-scanning projection video displays and compact, high-speed...
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| Format: | eBook |
| Language: | English |
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New York, NY
Springer US
2003, 2003
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| Edition: | 1st ed. 2003 |
| Series: | Microsystems
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| Online Access: | |
| Collection: | Springer Book Archives -2004 - Collection details see MPG.ReNa |
Table of Contents:
- 1 Introduction
- 2 Scanning Mirrors
- 3 Surface-MicromachinedMirrors
- 4 Staggered Torsional Electorstatic Combdrive (STEC) Micromirror
- 5 Example Application of Scanning Mirrors
- 6 Conclusions
- A Stec Fabrication Process Flow
- B Tos Fabrication Process Flow
- References