Microcantilevers for Atomic Force Microscope Data Storage

Microcantilevers for Atomic Force Microscope Data Storage describes a research collaboration between IBM Almaden and Stanford University in which a new mass data storage technology was evaluated. This technology is based on the use of heated cantilevers to form submicron indentations on a polycarbon...

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Bibliographic Details
Main Author: Chui, Benjamin W.
Format: eBook
Language:English
Published: New York, NY Springer US 1999, 1999
Edition:1st ed. 1999
Series:Microsystems
Subjects:
Online Access:
Collection: Springer Book Archives -2004 - Collection details see MPG.ReNa
Table of Contents:
  • 1 Introduction
  • 1.1 High-density data storage: a survey
  • 1.2 Alternative data storage approaches
  • 1.3 AFM thermomechanical data storage
  • 2 Heater-cantilevers for writing: design, fabrication and basic characterization
  • 2.1 Overview
  • 2.2 Heater design and fabrication
  • 2.3 Thermal writing experiments
  • 2.4 Measuring temperature coefficients of resistance
  • 2.5 Electrical I-V characteristics
  • 2.6 Summary
  • 3 Heater-cantilevers for writing: further characterization, modelling and optimization
  • 3.1 Overview
  • 3.2 Time-domain thermal analysis
  • 3.3 Frequency-domain thermal analysis
  • 3.4 Heater design optimization
  • 3.5 Summary
  • 4 Piezoresistive cantilevers for readback
  • 4.1 Overview
  • 4.2 Piezoresistive cantilever design analysis
  • 4.3 Piezoresistive cantilever fabrication
  • 4.4 Characterization of piezoresistive cantilevers
  • 4.5 Summary
  • 5 Dual axis piezoresistive cantilevers: design, fabrication and characterization
  • 5.1 Overview
  • 5.2 Dual-axis cantilever design
  • 5.3 Dual-axis cantilever fabrication
  • 5.4 Dual-axis cantilever characterization
  • 5.5 Summary
  • 6 Dual-axis piezoresistive cantilevers for tracking: applications
  • 6.1 Overview
  • 6.2 AFM data tracking
  • 6.3 Lateral force microscopy
  • 6.4 Summary
  • 7 Conclusion and future work
  • 7.1 Summary of results
  • 7.2 Future improvements
  • Appendix 1 Heater-cantilever fabrication process
  • Appendix 2 Piezoresistive cantilever fabrication process
  • Appendix 3 Dual-axis piezoresistive cantilever fabrication process