Scanning Electron Microscopy and X-Ray Microanalysis A Text for Biologists, Materials Scientists, and Geologists

This book has evolved by processes of selection and expansion from its predecessor, Practical Scanning Electron Microscopy (PSEM), published by Plenum Press in 1975. The interaction of the authors with students at the Short Course on Scanning Electron Microscopy and X-Ray Microanalysis held annually...

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Bibliographic Details
Main Authors: Goldstein, Joseph, Newbury, Dale E. (Author), Echlin, Patrick (Author), Joy, David C. (Author)
Format: eBook
Language:English
Published: New York, NY Springer US 1981, 1981
Edition:1st ed. 1981
Subjects:
Online Access:
Collection: Springer Book Archives -2004 - Collection details see MPG.ReNa
Table of Contents:
  • 1. Introduction
  • 1.1. Evolution of the Scanning Electron Microscope
  • 1.2. Evolution of the Electron Probe Microanalyzer
  • 1.3. Outline of This Book
  • 2. Electron Optics
  • 2.1. Electron Guns
  • 2.2. Electron Lenses
  • 2.3. Electron Probe Diameter, dp, vs. Electron Probe Current i
  • 3. Electron-Beam-Specimen Interactions
  • 3.1. Introduction
  • 3.2. Scattering
  • 3.3. Interaction Volume
  • 3.4. Backscattered Electrons
  • 3.5. Signals from Inelastic Scattering
  • 3.6. Summary
  • 4. Image Formation in the Scanning Electron Microscope
  • 4.1. Introduction
  • 4.2. The Basic SEM Imaging Process
  • 4.3. Stereomicroscopy
  • 4.4. Detectors
  • 4.5. The Roles of Specimen and Detector in Contrast Formation
  • 4.6. Image Quality
  • 4.7. Signal Processing for the Display of Contrast Information
  • 5. X-Ray Spectral Measurement: WDS and EDS
  • 5.1. Introduction
  • 5.2. Wavelength-Dispersive Spectrometer
  • 5.3. Energy-Dispersive X-Ray Spectrometer
  • 8.7. Light Element Analysis
  • 9. Materials Specimen Preparation for SEM and X-Ray Microanalysis
  • 9.1. Metals and Ceramics
  • 9.2. Particles and Fibers
  • 9.3. Hydrous Materials
  • 10. Coating Techniques for SEM and Microanalysis
  • 10.1. Introduction
  • 10.2. Thermal Evaporation
  • 10.3. Sputter Coating
  • 10.4. Specialized Coating Methods
  • 10.5. Determination of Coating Thickness
  • 11. Preparation of Biological Samples for Scanning Electron Microscopy
  • 11.1. Introduction
  • 11.2. Compromising the Microscope
  • 11.3. Compromising the Specimen
  • 12. Preparation of Biological Samples for X-Ray Microanalysis
  • 12.1. Introduction
  • 12.2. Ambient Temperature Preparative Procedures
  • 12.3. Low-Temperature Preparative Procedures
  • 12.4. Microincineration
  • 13. Applications of the SEM and EPMA to Solid Samples and Biological Materials
  • 13.1. Study of Aluminum-Iron Electrical Junctions
  • 13.2. Study of Deformation in Situ in the Scanning Electron Microscope
  • 13.3. Analysis of Phases in Raney Nickel Alloy
  • 13.4. Quantitative Analysis of a New Mineral, Sinoite
  • 13.5. Determination of the Equilibrium Phase Diagram for the Fe-Ni-C System
  • 13.6. Study of Lunar Metal Particle 63344,1
  • 13.7. Observation of Soft Plant Tissue with a High Water Content
  • 13.8. Study of Multicellular Soft Plant Tissue with High Water Content
  • 13.9. Examination of Single-Celled, Soft Animal Tissue with High Water Content
  • 13.10. Observation of Hard Plant Tissue with a Low Water Content
  • 13.11. Study of Single-Celled Plant Tissue with a Hard Outer Covering and Relatively Low Internal Water Content
  • 13.12. Examination of Medium Soft Animal Tissue with a High Water Content
  • 13.13. Study of Single-Celled Animal Tissue of High Water Content
  • 14. Data Base
  • Table 14.1. Atomic Number, Atomic Weight, and Density of Metals
  • Table 14.2. Common Oxides of the Elements
  • Table 14.3. Mass Absorption Coefficients for K? Lines
  • Table 14.4. Mass Absorption Coefficients for L? Lines
  • Table 14.5. Selected Mass Absorption Coefficients
  • Table 14.6. K Series X-Ray Wavelengths and Energies
  • Table 14.7. L Series X-Ray Wavelengths and Energies
  • Table 14.8. M Series X-Ray Wavelengths and Energies
  • Table 14.9. Fitting Parameters for Duncumb-Reed Backscattering Correction Factor R
  • Table 14.10. J Values and Fluorescent Yield, ?, Values
  • Table 14.11. Important Properties of Selected Coating Elements
  • References
  • 5.4. Comparison of Wavelength-Dispersive Spectrometers with Energy-Dispersive Spectrometers
  • Appendix: Initial Detector Setup and Testing
  • 6. Qualitative X-Ray Analysis
  • 6.1. Introduction
  • 6.2. EDS Qualitative Analysis
  • 6.3. WDS Qualitative Analysis
  • 6.4. X-Ray Scanning
  • 7. Quantitative X-Ray Microanalysis
  • 7.1. Introduction
  • 7.2. ZAF Technique
  • 7.3. The Empirical Method
  • 7.4. Quantitative Analysis with Nonnormal Electron Beam Incidence
  • 7.5. Analysis of Particles and Rough Surfaces
  • 7.6. Analysis of Thin Films and Foils
  • 7.7. Quantitative Analysis of Biological Material
  • Appendix A: Continuum Method
  • Appendix B: Worked Examples of Quantitative Analysis of Biological Material
  • Notation
  • 8. Practical Techniques of X-Ray Analysis
  • 8.1. General Considerations of Data Handling
  • 8.2. Background Shape
  • 8.3. Peak Overlap
  • 8.4. Dead-Time Correction
  • 8.5. Example of Quantitative Analysis
  • 8.6. Precision and Sensitivity in X-Ray Analysis