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Fundamental Electron Interactions with Plasma Processing Gases

This volume deals with the basic knowledge and understanding of fundamental interactions of low energy electrons with molecules. It pro­ vides an up-to-date and comprehensive account of the fundamental in­ teractions of low-energy electrons with molecules of current interest in modern technology, es...

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Bibliographic Details
Main Authors: Christophorou, Loucas G., Olthoff, James K. (Author)
Format: eBook
Language:English
Published: New York, NY Springer US 2004, 2004
Edition:1st ed. 2004
Series:Physics of Atoms and Molecules
Subjects:
Atoms
Physical Chemistry
Atomic, Molecular And Chemical Physics
Nuclear Physics
Optical Materials
Molecules
Online Access:
Collection: Springer Book Archives -2004 - Collection details see MPG.ReNa
Table of Contents:
  • 1. Fundamental Electron-Molecule Interactions and their Technological Significance
  • 1 Introduction
  • 2 Low Energy Electron-Molecule Interaction Processes
  • 3 Significance of Electron-Molecule Interactions in Plasma Processing
  • 4 The Present Work
  • 5 References
  • 2. Electron-Molecule Interactions in the Gas Phase: Cross Sections and Coefficients
  • 1 Introduction
  • 2 Collision Cross Sections
  • 3 Coefficients and Rate Constants
  • 4 Boltzmann-Code-Generated Collision Cross-Section Sets
  • 5 References
  • 3. Synthesis and Assessment of Electron Collision Data
  • 1 Introduction
  • 2 Synthesis, Assessment, and Recommendation of Data
  • 3 Deduction of Unavailable Data and Understanding from Assessed Data, New Measurements, and Data Needs
  • 4 Dissemination and Updating of the Database
  • 5 References
  • 4. Electron Interactions with CF4, C2F6, AND C3F8
  • 1 Introduction
  • 2 Electron Interactions with CF4
  • 3 Electron Interactions with C2F6
  • 4 Electron Interactions with C3F8
  • 5 References
  • 5. Electron Interactions with CHF3, CF3I, AND c-C4F8
  • 1 Introduction
  • 2 Electron Interactions with CHF3
  • 3 Electron Interactions with CF3I
  • 4 Electron Interactions with c-C4F8
  • 5 References
  • 6. Electron Interactions with Cl2, CCl2F2, BCl3, AND SF6
  • 1 Introduction
  • 2 Electron Interactions with Cl2
  • 3 Electron Interactions with CCl2F2
  • 4 Electron Interactions with BCl3
  • 5 Electron Interactions with SF6
  • 6 References

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