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Microsystem Design

It is a real pleasure to write the Foreword for this book, both because I have known and respected its author for many years and because I expect this book’s publication will mark an important milestone in the continuing worldwide development of microsystems. By bringing together all aspects of micr...

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Bibliographic Details
Main Author: Senturia, Stephen D.
Format: eBook
Language:English
Published: New York, NY Springer US 2001, 2001
Edition:1st ed. 2001
Subjects:
Classical Mechanics
Electrical And Electronic Engineering
Electrical Engineering
Optical Materials
Mechanics
Online Access:
Collection: Springer Book Archives -2004 - Collection details see MPG.ReNa
Table of Contents:
  • Getting Started
  • An Approach to Mems Design
  • Microfabrication
  • Process Integation
  • Modeling Strategies
  • Lumped Modeling with Circuit Elements
  • Energy-conserving Transducers
  • Lumped-element System Dynamics
  • Domain-Specific Details
  • Elasticity
  • Structures
  • Energy Methods
  • Dissipation and the Thermal Energy Domain
  • Lumped Modeling of Dissipative Processes
  • Fluids
  • Circuit and System Issues
  • Electronics
  • Feedback Systems
  • Noise
  • Case Studies
  • Packaging
  • A Piezoresistive Pressure Sensor
  • A Capacitive Accelerometer
  • Electrostatic Projection Displays
  • A Piezoelectric Rate Gyroscope
  • Microsystems for DNA Amplification
  • A Microbridge Combustible-gas Sensor

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