High Permittivity Gate Dielectric Materials
"The book comprehensively covers all the current and the emerging areas of the physics and the technology of high permittivity gate dielectric materials, including, topics such as MOSFET basics and characteristics, hafnium-based gate dielectric materials, Hf-based gate dielectric processing, me...
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| Format: | eBook |
| Language: | English |
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Berlin, Heidelberg
Springer Berlin Heidelberg
2013, 2013
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| Edition: | 1st ed. 2013 |
| Series: | Springer Series in Advanced Microelectronics
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| Online Access: | |
| Collection: | Springer eBooks 2005- - Collection details see MPG.ReNa |
Table of Contents:
- Historical Perspectives
- High Mobility Channels
- Non-Volatile Memory
- Hafnium-Based Gate Dielectric Materials
- Lanthanum-Based High-K Gate Dielectric Materials
- Crystalline High-K Gate Dielectric Materials
- High-K Gate Dielectric Processing.- Metal Gate Electrodes
- Flat-Band/Threshold Voltage Control
- Interfaces and Defects
- Electrical Characterization and Parameter Extraction
- Non-Contact Metrology of High-K Gate Dielectrics
- Channel Mobility
- High-K Gate Dielectric Reliability Issues
- Bias Temperature Instability
- Integration Issues.