Introduction to Microsystem Design
The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important...
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| Format: | eBook |
| Language: | English |
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Berlin, Heidelberg
Springer Berlin Heidelberg
2011, 2011
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| Edition: | 1st ed. 2011 |
| Series: | RWTHedition
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| Collection: | Springer eBooks 2005- - Collection details see MPG.ReNa |
Table of Contents:
- Preface
- Notations and symbols
- Introduction
- Scaling Laws
- Elastic deformations
- Thin Films
- Conductor Paths
- Membranes
- Strain gauges on membranes
- Beams
- Vibrations
- Capillaries
- Capacitive forces
- Piezoelectric effect
- Thermal actuators
- Micro optics
- Diffusion
- Micro valves
- Micro pumps
- Micro dosing
- Analogies between physical domains
- Mechanical devices for electronics
- Pressure sensors
- Flow sensors
- Inertial sensors