Reactive Sputter Deposition
The use of thin films is continuously expanding. In the family of Physical Vapour Deposition techniques, sputtering is one of the most important over the past 40 years. In this book, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, ar...
| Other Authors: | , |
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| Format: | eBook |
| Language: | English |
| Published: |
Berlin, Heidelberg
Springer Berlin Heidelberg
2008, 2008
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| Edition: | 1st ed. 2008 |
| Series: | Springer Series in Materials Science
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| Subjects: | |
| Online Access: | |
| Collection: | Springer eBooks 2005- - Collection details see MPG.ReNa |
Table of Contents:
- Simulation of the Sputtering Process
- Electron Emission from Surfaces Induced by Slow Ions and Atoms
- Modeling of the Magnetron Discharge
- Modelling of Reactive Sputtering Processes
- Depositing Aluminium Oxide: A Case Study of Reactive Magnetron Sputtering
- Transport of Sputtered Particles Through the Gas Phase
- Energy Deposition at the Substrate in a Magnetron Sputtering System
- Process Diagnostics
- Optical Plasma Diagnostics During Reactive Magnetron Sputtering
- Reactive Magnetron Sputtering of Indium Tin Oxide Thin Films: The Cross-Corner and Cross-Magnetron Effect
- Reactively Sputter-Deposited Solid Electrolytes and Their Applications
- Reactive SputteredWide-Bandgap p-Type Semiconducting Spinel AB2O4 and Delafossite ABO2 Thin Films for “Transparent Electronics”
- Oxide-Based Electrochromic Materials and Devices Prepared by Magnetron Sputtering
- Atomic Assembly of Magnetoresistive Multilayers