Piezoelectric Multilayer Beam Bending Actuators Static and Dynamic Behavior and Aspects of Sensor Integration

An important aim of the presented book is the explanation of the application of piezoelectric materials such as piezoceramics within the wide field of electromechanical actuators and sensor technology. The reader should be presented the physical and mechanical properties of piezoceramics in a distin...

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Bibliographic Details
Main Author: Ballas, Rüdiger G.
Format: eBook
Language:English
Published: Berlin, Heidelberg Springer Berlin Heidelberg 2007, 2007
Edition:1st ed. 2007
Series:Microtechnology and MEMS
Subjects:
Online Access:
Collection: Springer eBooks 2005- - Collection details see MPG.ReNa
Table of Contents:
  • Focus of the Book
  • Theoretical Aspects and Closed Form Analysis
  • Piezoelectric Materials
  • Linear Theory of Piezoelectric Materials
  • Theory of the Static Behavior of Piezoelectric Beam Bending Actuators
  • Piezoelectric Beam Bending Actuators and Hamilton’s Principle
  • Theory of the Dynamic Behavior of Piezoelectric Beam Bending Actuators
  • Network Representation of Piezoelectric Multilayered Bending Actuators
  • Measurement Setup and Validation of Theoretical Aspects
  • Measurement Setup for Piezoelectric Beam Bending Actuators
  • Measurements and Analytical Calculations
  • Sensor Integration for Tip Deflection Measurements
  • Piezoelectric Beam Bending Actuator with Integrated Sensor
  • Tip Deflection Measurement — Capacitive Sensor Principle
  • Tip Deflection Measurement — Inductive Sensor Principle
  • Conclusion