Advanced Mechatronics and MEMS Devices
Advanced Mechatronics and MEMS Devicesdescribes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly...
| Other Authors: | |
|---|---|
| Format: | eBook |
| Language: | English |
| Published: |
New York, NY
Springer New York
2013, 2013
|
| Edition: | 1st ed. 2013 |
| Series: | Microsystems
|
| Subjects: | |
| Online Access: | |
| Collection: | Springer eBooks 2005- - Collection details see MPG.ReNa |
Table of Contents:
- Development of a Silicon Based MEMS6-DoF-Force/Torque-Sensor
- Piezoelectrically Actuated Robotic End-effector with Strain Amplification Mechanisms
- Autocalibration of MEMS Accelerometers
- Miniaturization of Micromanipulation Tools
- Digital Microrobotics Using MEMS Technology
- Flexure-based Parallel-Kinematics Stages for Passive Assembly of MEMS Optical Switches
- Micro-Tactile Sensors for Measurement of In-Vivo Young’s Modulus and Shear Modulus of Elasticity
- Devices and techniques for micro-gripping
- A Wall-climbing Robot with Biomimetic Adhesive Pedrail
- Development of Bio-inspired Artificial Sensory Cilia
- Jumping Like an Insect: from Bio-mimetic Inspiration to a Jumping Mini Robot Design
- Modeling and H∞ PID Plus Feedforward Controller Design for an Electrohydraulic Actuator (EHA) System.