Nanofabrication Principles, Capabilities and Limits

Nanofabrication: Principles, Capabilities and Limits presents a one-stop description at the introductory level on most technologies that have been developed which are capable of making structures below 100nm. Principles of each technology are introduced and illustrated with minimum mathematics invol...

Full description

Bibliographic Details
Main Author: Cui, Zheng
Format: eBook
Language:English
Published: New York, NY Springer US 2008, 2008
Edition:1st ed. 2008
Subjects:
Online Access:
Collection: Springer eBooks 2005- - Collection details see MPG.ReNa
Table of Contents:
  • Nanofabrication by Photons
  • Nanofabrication by Charged Beams
  • Nanofabrication by Scanning Probes
  • Nanofabrication by Replication
  • Nanoscale Pattern Transfer
  • Indirect Nanofabrication
  • Nanofabrication by Self-Assembly