Fundamentals of Nanoscale Film Analysis
Modern science and technology, from materials science to integrated circuit development, is directed toward the nanoscale. From thin films to field effect transistors, the emphasis is on reducing dimensions from the micro to the nanoscale. Fundamentals of Nanoscale Film Analysis concentrates on anal...
| Main Authors: | , , |
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| Format: | eBook |
| Language: | English |
| Published: |
New York, NY
Springer US
2007, 2007
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| Edition: | 1st ed. 2007 |
| Subjects: | |
| Online Access: | |
| Collection: | Springer eBooks 2005- - Collection details see MPG.ReNa |
Table of Contents:
- An Overview: Concepts, Units, and the Bohr Atom
- Atomic Collisions and Backscattering Spectrometry
- Energy Loss of Light Ions and Backscattering Depth Profiles
- Sputter Depth Profiles and Secondary Ion Mass Spectroscopy
- Ion Channeling
- Electron-Electron Interactions and the Depth Sensitivity of Electron Spectroscopies
- X-ray Diffraction
- Electron Diffraction
- Photon Absorption in Solids and EXAFS
- X-ray Photoelectron Spectroscopy
- Radiative Transitions and the Electron Microprobe
- Nonradiative Transitions and Auger Electron Spectroscopy
- Nuclear Techniques: Activation Analysis and Prompt Radiation Analysis
- Scanning Probe Microscopy