Introductory MEMS Fabrication and Applications
Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on ME...
| Main Authors: | , |
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| Format: | eBook |
| Language: | English |
| Published: |
New York, NY
Springer US
2010, 2010
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| Edition: | 1st ed. 2010 |
| Subjects: | |
| Online Access: | |
| Collection: | Springer eBooks 2005- - Collection details see MPG.ReNa |
Table of Contents:
- Fabrication
- The substrate and adding material to it
- Creating and transferring patterns#x2014;Photolithography
- Creating structures#x2014;Micromachining
- Solid mechanics
- Applications
- Thinking about modeling
- MEMS transducers#x2014;An overview of how they work
- Piezoresistive transducers
- Capacitive transducers
- Piezoelectric transducers
- Thermal transducers
- to microfluidics
- Laboratories
- Microfabrication laboratories