Atomic Layer Deposition of Nanostructured Materials
Main Author: | |
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Other Authors: | |
Format: | eBook |
Language: | English |
Published: |
Wiley-VCH
2012
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Online Access: | |
Collection: | Wiley Online Books - Collection details see MPG.ReNa |
Physical Description: | 435 S. |
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ISBN: | 9783527327973 |