Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays
Format: | eBook |
---|---|
Published: |
Bellingham, Wash.
SPIE
1996
|
Series: | Proceedings of SPIE
|
Online Access: | |
Collection: | SPIE Conference Proceedings - Collection details see MPG.ReNa |
ISBN: | 9780819422507 |
---|