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1
Published 2012
Springer Vienna
Table of Contents: “...-Patterning -- Helium Ion Lithography -- Nanoimprint Technologies -- 3 Deposition at the Nanoscale -- Atomic...”
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2
by Luttge, Regina
Published 2011
William Andrew
Table of Contents: “... -- 4.1.5. Nanolithographic Technologies for the Microelectronics Industry -- 4.1.6. Nanoimprint Technology...”