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41
Optical/Laser
Microlithography
VIII
Published 1995
SPIE
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42
Optical/Laser
Microlithography
VII
Published 1994
SPIE
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43
Optical/Laser
Microlithography
V
Published 1992
SPIE
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44
Optical/Laser
Microlithography
IV
Published 1991
SPIE
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45
Optical/Laser
Microlithography
III
Published 1990
SPIE
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46
Microlithography
and Metrology in Micromachining III
Published 1997
SPIE
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47
Microlithography
and Metrology in Micromachining II
Published 1996
SPIE
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48
Optical/Laser
Microlithography
II
Published 1989
SPIE
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49
Developments in Semiconductor
Microlithography
II
Published 1977
SPIE
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50
Developments in Semiconductor
Microlithography
III
Published 1978
SPIE
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51
Developments in Semiconductor
Microlithography
IV
Published 1979
SPIE
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52
Developments in Semiconductor
Microlithography
V
Published 1980
SPIE
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53
10th Annual Symp on
Microlithography
Published 1991
SPIE
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54
Optical
Microlithography
II: Technology for the 1980s
Published 1983
SPIE
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55
Optical
Microlithography
and Metrology for Microcircuit Fabrication
Published 1989
SPIE
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56
Metrology, Inspection, and Process Control for
Microlithography
XXVI
Published 2012
SPIE
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57
Metrology, Inspection, and Process Control for
Microlithography
XXVII
Published 2013
SPIE
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58
Metrology, Inspection, and Process Control for
Microlithography
XI
Published 1997
SPIE
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59
Metrology, Inspection, and Process Control for
Microlithography
XII
Published 1998
SPIE
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60
Metrology, Inspection, and Process Control for
Microlithography
X
Published 1996
SPIE
1
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4
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79
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79
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12
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4
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3
620 - Engineering & allied operations
3
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2
510 - Mathematics
1
616 - Diseases
1
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1
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1
745 - Decorative arts
1
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English
26
Collection
SPIE Conference Proceedings
79
Springer Book Archives -2004
9
ACS Symposium Series
8
Springer eBooks 2005-
5
ACS Advances in Chemistry
3
O'Reilly
1
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American Chemical Society Division of Polymeric Materials: Science and Engineering
6
American Chemical Society Division of Polymer Chemistry
4
Bowden, M. J.
3
Thompson, L. F.
3
Willson, C. G.
3
American Chemical Society Meeting ( 1986, Anaheim, California)
2
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Reichmanis, Elsa
2
SpringerLink (Online service)
2
Turner, S. Richard
2
Abraham, Ajith
1
American Chemical Society
1
American Chemical Society Division of Organic Coating and Plastics Chemistry
1
American Chemical Society Meeting ( 1983, Seattle, Washington)
1
American Chemical Society Meeting ( 1984, St. Louis, Missouri)
1
American Chemical Society Meeting ( 1989, Dallas, Texas)
1
American Chemical Society Meeting ( 1992, San Francisco, California)
1
American Chemical Society Meeting ( 1994, Washington, D.C.)
1
American Chemical Society Meeting ( 1997, Las Vegas, Nevada)
1
American Chemical Society Meeting ( 1997, San Francisco, California)
1
Arce, Gonzalo R.
1
Bargon, Joachim
1
Basting, Dirk
1
Carter, G.
1
Chang, Richard
1
Clough, Roger L.
1
Doniach, S.
1
Fearon, F. W. Gordon
1
Frank, C. W.
1
Fréchet, J. M. J.
1
Grosan, Crina
1
Gundersen, Martin A.
1
Hawkes, P.W.
1
Hess, Dennis W.
1
International Topical Workshop "Advances in Silicon-Based Polymer Science" (1987, Makaha, Hawaii)
1
Ishibuchi, Hisao
1
Ito, Hiroshi
1
Iwayanagi, Takao
1
Jensen, Klavs F.
1
Jin, Helena
1
Joachim, Christian
1
Kiriakidis, G.
1
Lamberti, Luciano
1
Ma, Xu
1
MacDonald, Scott A.
1
Marowsky, Gerd
1
Mittal, Kashmiri Lal
1
Nalamasu, Omkaram
1
Schaefer, Gerhard
1
Sciammarella, Cesar
1
Shalaby, Shalaby W.
1
Tagawa, Seiichi
1
Ueno, Takumi
1
Valiev, Kamil A.
1
Whitton, J.L.
1
Winick, Herman
1
Yoshida, Sanichiro
1
Zeigler, John Martin
1
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