121
Published 2013
Springer Berlin Heidelberg
Subjects: ...Microelectromechanical systems...

122
by Fang, Zhen
Published 2010
Springer Berlin Heidelberg
Subjects: ...Microelectromechanical systems...

123
Published 2016
Springer International Publishing
Subjects: ...Microelectromechanical systems...

124
Published 2015
Springer International Publishing
Subjects: ...Microelectromechanical systems...

125
Published 2016
Springer International Publishing
Subjects: ...Microelectromechanical systems...

126
Published 2013
Springer Berlin Heidelberg
Subjects: ...Microelectromechanical systems...

127
by Yan Shan, Ang
Published 2018
Springer Nature Singapore
Subjects: ...Microelectromechanical systems...

128
Published 2019
Springer International Publishing
Subjects: ...Microelectromechanical systems...

129
by Demidov, Vadim V.
Published 2020
Springer International Publishing
Subjects: ...Microelectromechanical systems...

130
Published 2018
Springer International Publishing
Subjects: ...Microelectromechanical systems...

131
by Yuan, Shuai, Liu, Lianqing, Wang, Zhidong, Xi, Ning
Published 2020
Springer Nature Singapore
Subjects: ...Microelectromechanical systems...

132
Published 2020
Springer Nature Singapore
Subjects: ...Microelectromechanical systems...

134
Published 2011
Springer Berlin Heidelberg
Subjects: ...Microelectromechanical systems...

135
Published 2011
Springer Berlin Heidelberg
Subjects: ...Microelectromechanical systems...

136
by Solgaard, Olav
Published 2009
Springer US
Subjects: ...Microelectromechanical systems...

137
Published 2013
Springer Berlin Heidelberg
Subjects: ...Microelectromechanical systems...

138
Published 2011
Springer Vienna
Subjects: ...Microelectromechanical systems...

139
Published 2008
Springer Berlin Heidelberg
Subjects: ...Microelectromechanical systems...

140
Published 2013
Springer New York
Subjects: ...Microelectromechanical systems...