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781
by Elwenspoek, M., Wiegerink, R.
Published 2001
Springer Berlin Heidelberg
“..., and the systems made by micromachining are called MEMS (microelectromechanical systems). The present book...”
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782
by Zamkotsian, Frederic
Published 2019
MDPI - Multidisciplinary Digital Publishing Institute
“...Optical microelectromechanical systems (MEMS), microoptoelectromechanical systems (MOEMS...”
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783
by Yu, Hailiang
Published 2023
MDPI - Multidisciplinary Digital Publishing Institute
“... industries, and microelectromechanical systems is the major trend. Although some structures and parts...”
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784
by Yu, Hailiang
Published 2023
MDPI - Multidisciplinary Digital Publishing Institute
“... industries, and microelectromechanical systems is the major trend. Although some structures and parts...”
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785
Published 2008
Springer London
Table of Contents: “... Analysis of Microelectromechanical Systems (MEMS) -- Amorphous Hydrogenated Carbon Nanofilm -- Applications...”
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786
Published 1992
Springer Netherlands
“...Research into and development of high-precision systems, microelectromechanical systems...”
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787
Published 2001
Springer Netherlands
“... billion per year information storage industry. In the emerging microelectromechanical systems (MEMS...”
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788
by Free, Charles E., Aitchison, Colin S.
Published 2021
John Wiley & Sons, Inc.
Table of Contents: “... Transistors) -- 10.2.3 MEMS (Microelectromechanical Systems) -- 10.2.4 IPCS (Inline Phase Change Switch...”
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789
Published 2019
Springer Singapore
“...), radiofrequency microelectromechanical system (RF MEMS), very-large-scale integration (VLSI) design and electronic...”