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1
Published 2003
Springer Berlin Heidelberg
“...Microtechnology and MEMS...”
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2
by Kohl, Manfred
Published 2004
Springer Berlin Heidelberg
“...Microtechnology and MEMS...”
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3
by Zhang, Lian, Goodson, Kenneth E., Kenny, Thomas W.
Published 2004
Springer Berlin Heidelberg
“...Microtechnology and MEMS...”
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4
by Nassar, Raja, Dai, Weizhong
Published 2003
Springer Berlin Heidelberg
“...Microtechnology and MEMS...”
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5
by Elwenspoek, M., Wiegerink, R.
Published 2001
Springer Berlin Heidelberg
“...Microtechnology and MEMS...”
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6
by Zappe, Hans
Published 2004
Springer Berlin Heidelberg
“...Microtechnology and MEMS...”
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7
by Lange, D., Brand, O., Baltes, H.
Published 2002
Springer Berlin Heidelberg
“...Microtechnology and MEMS...”