Shape Memory Microactuators

by Kohl, Manfred
Published 2004

Silicon Microchannel Heat Sinks : Theories and Phenomena

by Zhang, Lian, Goodson, Kenneth E., Kenny, Thomas W.
Published 2004

Piezo-Electric Electro-Acoustic Transducers

by Sharapov, Valeriy, Sotula, Zhanna, Kunickaya, Larisa
Published 2014

Piezoceramic Sensors

by Sharapov, Valeriy
Published 2011

Piezoelectric Multilayer Beam Bending Actuators : Static and Dynamic Behavior and Aspects of Sensor Integration

by Ballas, Rüdiger G.
Published 2007

Modelling of Microfabrication Systems

by Nassar, Raja, Dai, Weizhong
Published 2003

Electromechanical Systems in Microtechnology and Mechatronics : Electrical, Mechanical and Acoustic Networks, their Interactions and Applications

by Lenk, Arno, Ballas, Rüdiger G., Werthschützky, Roland, Pfeifer, Günther
Published 2011

Micromechanical Photonics

by Ukita, Hiroo
Published 2006

Design and Manufacturing of Active Microsystems

Published 2011

Fast Simulation of Electro-Thermal MEMS : Efficient Dynamic Compact Models

by Bechtold, Tamara, Rudnyi, Evgenii B., Korvink, Jan G.
Published 2007

Engineering of Micro/Nano Biosystems : Fundamentals & Applications

Published 2020