1
by Bechtold, Tamara, Rudnyi, Evgenii B., Korvink, Jan G.
Published 2007
Springer Berlin Heidelberg
...Microtechnology and MEMS...

2
by Wang, Zhong Lin
Published 2012
Springer Berlin Heidelberg
...Microtechnology and MEMS...

3
Published 2011
Springer Berlin Heidelberg
...Microtechnology and MEMS...

4
by Sharapov, Valeriy
Published 2011
Springer Berlin Heidelberg
...Microtechnology and MEMS...

5
Published 2003
Springer Berlin Heidelberg
...Microtechnology and MEMS...

6
by Lambert, Pierre
Published 2007
Springer US
...Microtechnology and MEMS...

7
by Sharapov, Valeriy, Sotula, Zhanna, Kunickaya, Larisa
Published 2014
Springer International Publishing
...Microtechnology and MEMS...

8
Published 2013
Springer Berlin Heidelberg
...Microtechnology and MEMS...

9
by Schwizer, Jürg, Mayer, Michael, Brand, Oliver
Published 2005
Springer Berlin Heidelberg
...Microtechnology and MEMS...

10
by Hierlemann, Andreas
Published 2005
Springer Berlin Heidelberg
...Microtechnology and MEMS...

11
by Ukita, Hiroo
Published 2006
Springer Berlin Heidelberg
...Microtechnology and Mems...

12
by Ballas, Rüdiger G.
Published 2007
Springer Berlin Heidelberg
...Microtechnology and Mems...

13
by Wong, Basil T.
Published 2008
Springer Berlin Heidelberg
...Microtechnology and MEMS...

14
by Graf, Markus, Barrettino, Diego, Baltes, Henry P., Hierlemann, Andreas
Published 2007
Springer Berlin Heidelberg
...Microtechnology and MEMS...

15
by Li, Flora M., Nathan, Arokia
Published 2005
Springer Berlin Heidelberg
...Microtechnology and Mems...

16
by Lenk, Arno
Published 2011
Springer Berlin Heidelberg
...Microtechnology and MEMS...

17
by Elwenspoek, Miko, Wiegerink, Remco
Published 2001
Springer Berlin Heidelberg
...Microtechnology and MEMS...

18
by Lange, D., Brand, O., Baltes, H.
Published 2002
Springer Berlin Heidelberg
...Microtechnology and Mems...

19
by Kohl, Manfred
Published 2004
Springer Berlin Heidelberg
...Microtechnology and MEMS...

20
by Zhang, Lian, Goodson, Kenneth E., Kenny, Thomas W.
Published 2004
Springer Berlin Heidelberg
...Microtechnology and MEMS...