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1
Published 2003
Springer Berlin Heidelberg
“...Microtechnology and MEMS...”
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2
by Wang, Zhong Lin, Zhang, Yan, Hu, Weiguo
Published 2023
Springer Nature Switzerland
“...Microtechnology and MEMS...”
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3
by Hierlemann, Andreas
Published 2005
Springer Berlin Heidelberg
“...Microtechnology and MEMS...”
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4
by Li, Flora, Nathan, Arokia
Published 2005
Springer Berlin Heidelberg
“...Microtechnology and MEMS...”
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5
by Ukita, Hiroo
Published 2006
Springer Berlin Heidelberg
“...Microtechnology and MEMS...”
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6
by Ballas, Rüdiger G.
Published 2007
Springer Berlin Heidelberg
“...Microtechnology and MEMS...”
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8
Published 2011
Springer Berlin Heidelberg
“...Microtechnology and MEMS...”
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9
by Lambert, Pierre
Published 2007
Springer US
“...Microtechnology and MEMS...”
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10
by Schwizer, Jürg, Mayer, Michael, Brand, Oliver
Published 2005
Springer Berlin Heidelberg
“...Microtechnology and MEMS...”
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11
by Bechtold, Tamara, Rudnyi, Evgenii B., Korvink, Jan G.
Published 2007
Springer Berlin Heidelberg
“...Microtechnology and MEMS...”
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12
by Wong, Basil T., Mengüç, Pinar M.
Published 2008
Springer Berlin Heidelberg
“...Microtechnology and MEMS...”
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13
by Wang, Zhong Lin
Published 2012
Springer Berlin Heidelberg
“...Microtechnology and MEMS...”
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14
by Sharapov, Valeriy, Sotula, Zhanna, Kunickaya, Larisa
Published 2014
Springer International Publishing
“...Microtechnology and MEMS...”
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15
Published 2013
Springer Berlin Heidelberg
“...Microtechnology and MEMS...”
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16
by Graf, Markus, Barrettino, Diego, Baltes, Henry P., Hierlemann, Andreas
Published 2007
Springer Berlin Heidelberg
“...Microtechnology and MEMS...”
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17
Published 2018
Springer International Publishing
“...Microtechnology and MEMS...”
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18
by Kohl, Manfred
Published 2004
Springer Berlin Heidelberg
“...Microtechnology and MEMS...”
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19
by Elwenspoek, M., Wiegerink, R.
Published 2001
Springer Berlin Heidelberg
“...Microtechnology and MEMS...”
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20
by Lange, D., Brand, O., Baltes, H.
Published 2002
Springer Berlin Heidelberg
“...Microtechnology and MEMS...”