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1
Published 1988
Springer Berlin Heidelberg
Table of Contents: “... -- Application of polymer in encapsulation of electronic parts -- Photoresist systems for microlithography...”
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2
by Valiev, Kamil A.
Published 1992
Springer US
Table of Contents: “... Microlithography -- 5. Optical Lithography -- 6. Procedures for Processing Exposed Resist Films and Resist Mask...”
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3
by Bargon, Joachim
Published 1984
Springer US
Table of Contents: “... -- Photolithography and X-Ray Lithography -- Electron Beam Lithography -- Microlithography for VLSI and Beyond...”
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4
Published 1982
Springer US
Table of Contents: “... Produced by Microlithography -- Nonlinear Optical Effects -- List of Contributors...”
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5
by Winick, Herman, Doniach, S.
Published 1980
Springer US
Table of Contents: “... and Surfaces -- 7. Microlithography with Soft X Rays -- 8. Soft X-Ray Microscopy of Biological Specimens -- 9...”
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6
by Mittal, Kashmiri Lal
Published 1987
Springer US
Table of Contents: “... to Microelectronics -- Properties and Applications of Wel1-Tailored Organized Assemblies -- Microlithography...”
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7
Published 1986
Springer Netherlands
Table of Contents: “.... Applications of Ion Beams in Microlithography -- 21. In Situ Ion Beam Processing for Josephson Junction...”
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8
Published 1990
Springer US
“..., accelerators and free electron lasers, high power tubes, electron and ion beams, microlithography, accelerators...”
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9
Published 1982
Springer Berlin Heidelberg
“... the reflection and transmission scanning microscopes, to co­ lumns for micromachining and microlithography...”