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dewey-ones:"600 - Technology"
dewey-ones:"000 - Computer science, information & general works"
author_facet:"Žukauskaitė, Agnė"
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Piezoelectric Aluminium Scandium Nitride (AlScN) Thin
Films
: Material Development and Applications in Microdevices
by
Žukauskaitė, Agnė
Published 2023
MDPI - Multidisciplinary Digital Publishing Institute
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530 - Physics
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600 - Technology
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Žukauskaitė, Agnė
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