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1
Published 2012
Springer New York
Subjects: “...Microelectromechanical systems...”
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2
Published 2020
Springer Nature Singapore
Subjects: “...Microelectromechanical systems...”
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3
Published 2017
Springer Nature Singapore
Subjects: “...Microelectromechanical systems...”
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4
Published 2006
Springer Berlin Heidelberg
Subjects: “...Microelectromechanical systems...”
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5
Published 2020
Springer Nature Singapore
Subjects: “...Microelectromechanical systems...”
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6
by Bhushan, Bharat
Published 2010
Springer Berlin Heidelberg
Subjects: “...Microelectromechanical systems...”
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7
Published 2021
Springer Nature Singapore
Subjects: “...Microelectromechanical systems...”
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8
Published 2017
Springer Nature Singapore
Subjects: “...Microelectromechanical systems...”
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9
Published 2013
Springer Berlin Heidelberg
“..., microelectromechanical systems (MEMS), microfluidics, and electronics. The target audience for this book includes...”