1
by Celano, Umberto
Published 2016
Springer International Publishing
Subjects: ...Microelectromechanical systems...

2
by Voigtländer, Bert
Published 2019
Springer International Publishing
Subjects: ...Microelectromechanical systems...

3
by Wei, Huibin
Published 2013
Springer Berlin Heidelberg
Subjects: ...Microelectromechanical systems...

4
Published 2012
Springer Berlin Heidelberg
Subjects: ...Microelectromechanical systems...

5
by Yoshimura, Nagamitsu
Published 2014
Springer Japan
Subjects: ...Microelectromechanical systems...

6
by Evtugyn, Gennady
Published 2014
Springer Berlin Heidelberg
Subjects: ...Microelectromechanical systems...

7
Published 2016
Springer International Publishing
Subjects: ...Microelectromechanical systems...

8
Published 2014
Springer New York
Subjects: ...Microelectromechanical systems...

9
Published 2018
Springer International Publishing
Subjects: ...Microelectromechanical systems...