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1
by Bargon, Joachim
Published 1984
Springer US
Table of Contents: “... -- Photolithography and X-Ray Lithography -- Electron Beam Lithography -- Microlithography for VLSI and Beyond...”
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2
Published 1989
Springer US
Table of Contents: “... Control and Measurement in Ultra-pure VLSI Grade Inert Gases -- Design and Practical Considerations...”
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3
Published 1984
Springer Berlin Heidelberg
Table of Contents: “... of Submicron VLSI-Structures --...”