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1
Published 1988
Springer Berlin Heidelberg
Table of Contents: “... -- Application of polymer in encapsulation of electronic parts -- Photoresist systems for microlithography...”
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2
by Bargon, Joachim
Published 1984
Springer US
Table of Contents: “... -- Photolithography and X-Ray Lithography -- Electron Beam Lithography -- Microlithography for VLSI and Beyond...”
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3
Published 2020
Springer International Publishing
Table of Contents: “...-microlithography fabrication of the parts of a micro-mechanical calculator -- Fabricating solid state gears...”
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4
by Mittal, Kashmiri Lal
Published 1987
Springer US
Table of Contents: “... to Microelectronics -- Properties and Applications of Wel1-Tailored Organized Assemblies -- Microlithography...”