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1
by van Roosmalen, A.J., Baggerman, J.A.G., Brader, S.J.H.
Published 1991
Springer US
“..., systems, processes, tools, and applications of etching with gas plasmas for VLSI. Examples are given...”
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2
by McAshan, Michael
Published 1989
Springer US
Table of Contents: “... of Radhard VLSI Electronics for SSC Calorimeters -- 2D. Supersconducting Wire and Cable Chairman: C. Taylor...”