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dewey-ones:"500 - Natural sciences & mathematics"
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1
Lasers in
Microlithography
Published 1987
SPIE
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2
Optical
Microlithography
XXVIII
Published 2015
SPIE
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3
Optical
Microlithography
XXV
Published 2012
SPIE
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4
Optical
Microlithography
XXVI
Published 2013
SPIE
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5
Optical
Microlithography
XXI
Published 2008
SPIE
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6
Optical
Microlithography
XXII
Published 2009
SPIE
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7
Advanced
Microlithography
Technologies
Published 2005
SPIE
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8
Optical
Microlithography
XVI
Published 2003
SPIE
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9
Optical
Microlithography
XII
Published 1999
SPIE
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10
Optical
Microlithography
X
Published 1997
SPIE
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11
Optical
Microlithography
IX
Published 1996
SPIE
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12
Microlithography
and Metrology in Micromachining
Published 1995
SPIE
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13
Optical
Microlithography
XXIII
Published 2010
SPIE
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14
Optical
Microlithography
XVIII
Published 2005
SPIE
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15
Optical
Microlithography
XX
Published 2007
SPIE
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16
Optical
Microlithography
XIV
Published 2001
SPIE
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17
Optical
Microlithography
XIII
Published 2000
SPIE
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18
Optical
Microlithography
XI
Published 1998
SPIE
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19
Optical/Laser
Microlithography
Published 1993
SPIE
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20
Optical
Microlithography
XVII
Published 2004
SPIE
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Classification: 500 - Natural sciences & mathematics
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500 - Natural sciences & mathematics
600 - Technology
79
Collection
SPIE Conference Proceedings
79
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