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1
Published 1992
SPIE

2
Published 2012
SPIE

3
Published 2013
SPIE

4
Published 2015
SPIE

5
Published 2017
SPIE

6
Published 2020
SPIE

7
Published 2018
SPIE

8
Published 2019
SPIE

9
Published 2014
SPIE

10
Published 2016
SPIE

11
Published 1984
SPIE

16
by Chang, C. Y.
Published 1994
J. Wiley & Sons
... provides an introduction to wafer cleaning techniques and environment control, wet etching methods...

17
by Rahman, Faiz
Published 2013
Pan Stanford Pub.
Table of Contents: ...1. Nanosphere lithography for high-density nanopatterning / Hirotaka Oshima -- 2. Dry etching...

18
Published 2001
Springer Netherlands
Table of Contents: ... of Sliding Contact: When Micro meets Macro -- Nanostructuring of Calcite Surfaces by Tribomcchanical Etching...

19
by Sankaran, R. Mohan
Published 2012
CRC Press
Table of Contents: ...1. Nanoscale etching and deposition / Nathan Marchack and Jane P. Chang -- 2. Extreme ultraviolet...

20
Published 1993
Springer Netherlands
Table of Contents: ... -- Optical Spectroscopy of Dry Etched Zinc Telluride -- Exciton-Phonon Coupling in Spherical Semiconductor...