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1
Simulation of Semiconductor Devices and Processes : Vol.5
Published 1993
Springer Vienna
Table of Contents:
“
... -- Simulation of Sputter
Deposition
Process by DUPSIM -- Process Simulation for Nonplanar Structures...
”
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Author: Stippel, Hannes
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621 - Applied physics
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English
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Springer Book Archives -2004
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Selberherr, Siegfried
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Stippel, Hannes
Strasser, Ernst
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