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22microelectromechanical systems » microelectromechanical systems, microelectromechanical system, nanoelectromechanical systems

1
by Shimizu, Kenichi, Mitani, Tomoaki
Published 2010
Springer Berlin Heidelberg
Table of Contents: ... for High-Resolution Channeling BSE Imaging -- Application Example 22: Oxidation of Sputtered Metal Surface...