1 Table of Contents: “...A review of materials science -- Vacuum science and technology -- Thin-film evaporation processes...”

2 Table of Contents: “...4.2. Plasmas, Discharges, and Arcs -- 4.3. Fundamentals of Plasma Physics -- 4.4. Reactions...”

3 Table of Contents: “...A review of materials science -- Vacuum science and technology -- Thin-film evaporation processes...”