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1
by Metev, Simeon M., Veiko, Vadim P.
Published 1998
Springer Berlin Heidelberg
Table of Contents: ... Microtechnological Equipment -- 2.2 Lasers Used in Microtechnological Systems -- 2.3 Optical Arrangement...

2
by Metev, Simeon M., Veiko, Vadim P.
Published 1994
Springer Berlin Heidelberg
Table of Contents: ... Microtechnological Equipment -- 2.2 Lasers Used in Microtechnological Systems -- 2.3 Optical Arrangement...