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author_facet:"Kamins, Ted"
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1
Polycrystalline Silicon for Integrated Circuit Applications
by
Kamins, Ted
Published 1988
Springer US
Table of Contents:
“
... structure -- 2.5 Grain orientation -- 2.6 Optical properties -- 2.7
Etch
rate -- 2.8 Stress -- 2.9 Thermal...
”
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2
Polycrystalline Silicon for Integrated Circuits and Displays
by
Kamins, Ted
Published 1998
Springer US
Table of Contents:
“
... Thermal conductivity -- 2.8 Mechanical properties -- 2.9 Oxygen contamination -- 2.10
Etching
-- 2.11...
”
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Author: Kamins, Ted
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621 - Applied physics
2
Language
English
2
Collection
Springer Book Archives -2004
2
Author
Kamins, Ted
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