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1
by Kamins, Ted
Published 1988
Springer US
Table of Contents: “... structure -- 2.5 Grain orientation -- 2.6 Optical properties -- 2.7 Etch rate -- 2.8 Stress -- 2.9 Thermal...”
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2
by Kamins, Ted
Published 1998
Springer US
Table of Contents: “... Thermal conductivity -- 2.8 Mechanical properties -- 2.9 Oxygen contamination -- 2.10 Etching -- 2.11...”