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author_facet:"Gutmann, Ronald J."
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Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses : Fundamental Mechanisms and Application to IC Interconnect Technology
by
Borst, Christopher Lyle
,
Gill, William N.
,
Gutmann, Ronald J.
Published 2002
Springer US
Table of Contents:
“
... Experiments with
Potassium
Dichromate
Based Slurry -- 7.5 Summary --...
”
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670 - Manufacturing
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Springer Book Archives -2004
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Borst, Christopher Lyle
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Gill, William N.
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Gutmann, Ronald J.
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