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author_facet:"Gusev, Evgeni"
dewey-ones:"620 - Engineering & allied operations"
product_txtF_mv:"Springer Book Archives -2004"
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Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices
Published 1998
Springer Netherlands
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620 - Engineering & allied operations
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Springer Book Archives -2004
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Garfunkel, Eric
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Gusev, Evgeni
Vul', Alexander
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