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author_facet:"Biesemans, Serge"
dewey-ones:"621 - Applied physics"
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Simulation of Semiconductor Processes and Devices 1998 : SISPAD 98
Published 1998
Springer Vienna
Table of Contents:
“
... Algorithms for Three-Dimensional Etching and
Deposition
Simulation -- Development of
a
Gas-Phase Chemistry...
”
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Author: Biesemans, Serge
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Classification: 621 - Applied physics
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Springer Book Archives -2004
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Biesemans, Serge
Meyer, Kristin De
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